Introduction to MEMS
What Are MEMS? What Can They Do? This talk is an introduction to the enabling technology of MEMS. The first MEMS devices was made in 1967, the first commercial products were pressure sensors introduced in the mid-80's. The talk will present the various processing techniques for MEMS manufacturing and the different commercial MEMS devices that are available today. The effect of MEMS in telecommunications and life-sciences industries will also be presented.